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Wafer scale nano-membranes supported on a silicon microsieve using thin-film transfer technology
Unnikrishnan, Sandeep, Jansen, Henri, Berenschot, Erwin, Elwenspoek, MikoVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/6/064005
Date:
June, 2008
File:
PDF, 773 KB
english, 2008