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Thermal expansion analysis for differential pressure transducers by the LIGA process
Choi, BumkyooVolume:
5
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/5/4/001
Date:
December, 1995
File:
PDF, 413 KB
english, 1995