Characteristics of C 2 Radical...

Characteristics of C 2 Radical in CHF 3 and CF 4 Electron Cyclotron Resonance Plasmas Studied by Optical Emission Spectroscopy

Wei, Du, Chao, Ye, Shan-hua, Cheng, Zhao-yuan, Ning
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Volume:
4
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/4/6/005
Date:
December, 2002
File:
PDF, 372 KB
english, 2002
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