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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Emerging Digital Micromirror Device Based Systems and Applications - Development of MOEMS technology in maskless lithography
Smith, David, Klenk, Dieter, Hornbeck, Larry J., Douglass, Michael R.Volume:
7210
Year:
2009
Language:
english
DOI:
10.1117/12.809549
File:
PDF, 231 KB
english, 2009