SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - Fiber-based multi-beam laser Doppler vibrometer for measuring transient vibrations
Guo, M., Fu, Y., Phua, P. B., Garcia-Blanco, Sonia, Ramesham, RajeshuniVolume:
7928
Year:
2011
Language:
english
DOI:
10.1117/12.873164
File:
PDF, 664 KB
english, 2011