200 kV Mass-Separated Fine Focused Ion Beam Apparatus

Japanese Journal of Applied Physics 1985 / 7 Vol. 24; Iss. Part 2, No

200 kV Mass-Separated Fine Focused Ion Beam Apparatus

Shiokawa, Takao, Kim, Pil Hyon, Toyoda, Koichi, Namba, Susumu, Gamo, Kenji, Aihara, Ryuso, Anazawa, Norimichi
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.24.l566
Date:
July, 1985
File:
PDF, 1.11 MB
1985
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