Elastic Recoil Detection Analysis of Hydrogen Content in Hydrogenated Amorphous Silicon Fims
Kudo, Hiroshi, Kawazu, Yunosuke, Miura, Akira, Arai, ToshihiroVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.29.1050
Date:
June, 1990
File:
PDF, 331 KB
1990