Minimization of X-Ray Mask Distortion by Two-Dimensional Finite Element Method Simulation
Kishimoto, Akihiko, Kuniyoshi, Shinji, Saito, Naoto, Soga, Takashi, Mochiji, Kozo, Kimura, TakeshiVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.29.2203
Date:
October, 1990
File:
PDF, 559 KB
1990