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Spectroscopic Ellipsometry Study of (111) and (100)Si Surfaces Etched in Aqueous KOH Solution
Adachi, Sadao, Ikegami, Tomohiro, Utani, KatsuyukiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.4398
Date:
October, 1993
File:
PDF, 1.21 MB
1993