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A New Drain Engineering Structure-SCD-LDD (Surface Counter Doped LDD) for Improved Hot Carrier Reliability
Chou, Jih Wen, Chang, Chun Yun, Ho, Lien Tse, Ko, Joe, Hsue, PeterVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.l1203
Date:
September, 1993
File:
PDF, 501 KB
1993