Dynamics of Silicon Particles in DC Silane Plasmas...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Dynamics of Silicon Particles in DC Silane Plasmas Transported by a Modulated Magnetic Field

Fujiyama, Hiroshi, Kawasaki, Hiroharu, Yang, Sung-Chae, Matsuda, Yoshinobu
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.33.4216
Date:
July, 1994
File:
PDF, 826 KB
1994
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