Effect of Preoxide on the Structure of Thermal Oxide

Japanese Journal of Applied Physics 1995 / 1 Vol. 34; Iss. Part 1, No

Effect of Preoxide on the Structure of Thermal Oxide

Nohira, Hiroshi, Saito, Kenji, Sakusabe, Kenichi, Makihara, Koji, Morita, Mizuho, Ohmi, Tadahiro, Hattori, Takeo
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.245
Date:
January, 1995
File:
PDF, 802 KB
1995
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