Reduction of X-Ray Irradiation-Induced Pattern Displacement...

Japanese Journal of Applied Physics 1995 / 12 Vol. 34; Iss. Part 1, No

Reduction of X-Ray Irradiation-Induced Pattern Displacement of SiN Membranes Using H + Ion Implantation Technique

Ashikaga, Kinya, Tsuboi, Shinji, Yamashita, Yoshio, Ohta, Tsuneaki, Noda, Syuichi, Kasai, Masanori, Hoga, Hiroshi
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.6725
Date:
December, 1995
File:
PDF, 576 KB
1995
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