Maskless Deposition of Au on GaAs by Low-Energy Focused Ion...

Japanese Journal of Applied Physics 1995 / 12 Vol. 34; Iss. Part 1, No

Maskless Deposition of Au on GaAs by Low-Energy Focused Ion Beam

Kito, Kuniyoshi, Yanagisawa, Junichi, Monden, Kentaro, Nakayama, Hiromasa, Yuba, Yoshihiko, Gamo, Kenji
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.6853
Date:
December, 1995
File:
PDF, 590 KB
1995
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