Electron-Cyclotron-Resonance Sputtered...

Japanese Journal of Applied Physics 1996 / 9 Vol. 35; Iss. Part 1, No

Electron-Cyclotron-Resonance Sputtered S r T i O 3 Thin Films

Itsumi, Manabu, Ohfuji, Shin-ichi, Akiya, Hideo
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.35.4963
Date:
September, 1996
File:
PDF, 805 KB
1996
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