A Generalized Model for Resolution-Dependent Roughness Measured by an Optical Profiler for Optical Surfaces
Furukawa, Masakazu, Kitagawa, Hideo, Fukuda, Yasuaki, Kohno, TsuguoVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.268
Date:
January, 1999
File:
PDF, 359 KB
english, 1999