Low-Temperature and High-Rate Deposition of SrTiO...

Japanese Journal of Applied Physics 2000 / 1 Vol. 39; Iss. Part 1, No

Low-Temperature and High-Rate Deposition of SrTiO 3 Thin Films by RF Magnetron Sputtering

Kohara, Naoki, Yoshida, Akihisa, Sawada, Taisuke, Kitagawa, Masatoshi
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.172
Date:
January, 2000
File:
PDF, 948 KB
english, 2000
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