Influence of Plasma State on the Structural Property of...

Japanese Journal of Applied Physics 2003 / 10 Vol. 42; Iss. Part 1, No

Influence of Plasma State on the Structural Property of Vertically Oriented Carbon Nanotubes Grown by RF Plasma-Enhanced Chemical Vapor Deposition

Ikuno, Takashi, Katayama, Mitsuhiro, Kamada, Kazunori, Hiwatashi, Shinji, Ohkura, Shigeharu, Honda, Shin-ichi, Oura, Kenjiro
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.6717
Date:
October, 2003
File:
PDF, 247 KB
english, 2003
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