Bi-Mode Breakdown Test Methodology of Ultrathin Oxide

Japanese Journal of Applied Physics 2003 / 12 Vol. 42; Iss. Part 1, No

Bi-Mode Breakdown Test Methodology of Ultrathin Oxide

Su, Hung-Der, Chiou, Bi-Shiou, Ko, Chin-Yuan, Wu, Shien-Yang, Chang, Ming-Hsung, Lee, Kuo-Hua, Chen, Yung-Shun, Chao, Chih-Ping, See, Yee-Chaung, Sun, Jack Yuan-Chen
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.7232
Date:
December, 2003
File:
PDF, 150 KB
english, 2003
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