High-Speed Damage-Free Contact Hole Etching Using Dual...

Japanese Journal of Applied Physics 2004 / 4 Vol. 43; Iss. 4B

High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment

Goto, Tetsuya, Yamauchi, Hiroshi, Kato, Takeyoshi, Terasaki, Masato, Teramoto, Akinobu, Hirayama, Masaki, Sugawa, Shigetoshi, Ohmi, Tadahiro
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.1784
Date:
April, 2004
File:
PDF, 163 KB
english, 2004
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