Characterization of (11\bar20) Textured ZnO Films...

Japanese Journal of Applied Physics 2004 / 5 Vol. 43; Iss. 5B

Characterization of (11\bar20) Textured ZnO Films Fabricated by RF Magnetron Sputtering

Yanagitani, Takahiko, Tomohiro, Shin-ichi, Nohara, Takuya, Matsukawa, Mami, Watanabe, Yoshiaki, Otani, Takahiko
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.3004
Date:
May, 2004
File:
PDF, 335 KB
english, 2004
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