Fabrication of Optical Microelectromechanical-System...

Japanese Journal of Applied Physics 2004 / 9 Vol. 43; Iss. 9A

Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes

Ishii, Hiromu, Urano, Masami, Tanabe, Yasuyuki, Shimamura, Toshishige, Yamaguchi, Joji, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Uenishi, Yuji, Machida, Katsuyuki
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.6468
Date:
September, 2004
File:
PDF, 372 KB
english, 2004
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