Morphological Stability of Si(001) Surface Immersed in Fluid Mixture of Ultrapure Water and Silica Powder Particles in Elastic Emission Machining
Kubota, Akihisa, Mimura, Hidekazu, Inagaki, Kouji, Yumoto, Hirokatsu, Mori, Yuzo, Yamauchi, KazutoVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.5893
Date:
August, 2005
File:
PDF, 374 KB
english, 2005