Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma...

Japanese Journal of Applied Physics 2005 / 12 Vol. 44; Iss. No. 52

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

Kondo, Yoshimasa, Saito, Takao, Terazawa, Tatsuya, Saito, Masanori, Ohtake, Naoto
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.l1573
Date:
December, 2005
File:
PDF, 140 KB
english, 2005
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