Ultra-Shallow Junction Formation by Green-Laser Annealing...

Ultra-Shallow Junction Formation by Green-Laser Annealing with Light Absorber

Takii, Eisuke, Eto, Takanori, Kurobe, Ken-ichi, Shibahara, Kentaro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.l756
Date:
June, 2005
File:
PDF, 150 KB
english, 2005
Conversion to is in progress
Conversion to is failed