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Ultra-Shallow Junction Formation by Green-Laser Annealing with Light Absorber
Takii, Eisuke, Eto, Takanori, Kurobe, Ken-ichi, Shibahara, KentaroVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.l756
Date:
June, 2005
File:
PDF, 150 KB
english, 2005