Surface Structure Formed by the Reaction of...

Japanese Journal of Applied Physics 2008 / 3 Vol. 47; Iss. 3

Surface Structure Formed by the Reaction of Monomethylgermane on Si(001) Surface

Yasui, Kanji, Kanemaru, Tetsushi, Ogiwara, Tomoaki, Nishiyama, Hiroshi, Inoue, Yasunobu, Akahane, Tadashi, Takata, Masasuke
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.1690
Date:
March, 2008
File:
PDF, 408 KB
english, 2008
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