Effects of Rate Constant for Deprotection on Latent Image...

Japanese Journal of Applied Physics 2008 / 6 Vol. 47; Iss. 6

Effects of Rate Constant for Deprotection on Latent Image Formation in Chemically Amplified Extreme Ultraviolet Resists

Kozawa, Takahiro, Tagawa, Seiichi, Santillan, Julius Joseph, Toriumi, Minoru, Itani, Toshiro
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.4926
Date:
June, 2008
File:
PDF, 200 KB
english, 2008
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