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Simple Model to Inclusively Understand a Radiated Wave Field in Slot-Excited Microwave Plasmas
Tsuji, Akihiro, Yasaka, YasuyoshiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.49.126001
Date:
December, 2010
File:
PDF, 2.03 MB
english, 2010