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Molecular Dynamics of Ion Incident Angle Dependence of Sputtering Yield in Chlorine-Adsorbed GaN Crystal
Harafuji, Kenji, Kawamura, KatsuyukiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.50.08jg03
Date:
August, 2011
File:
PDF, 638 KB
english, 2011