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Comparative Study of Plasma-Charging Damage in High-$k$ Dielectric and p–n Junction and Their Effects on Off-State Leakage Current of Metal–Oxide–Semiconductor Field-Effect Transistors
Kamei, Masayuki, Takao, Yoshinori, Eriguchi, Koji, Ono, KouichiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.50.08kd05
Date:
August, 2011
File:
PDF, 924 KB
english, 2011