Micro-optical design of a three-dimensional microlens...

Applied Optics 2015 / 08 Vol. 54; Iss. 22

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems

Baranski, Maciej, Bargiel, Sylwester, Passilly, Nicolas, Gorecki, Christophe, Jia, Chenping, Frömel, Jörg, Wiemer, Maik
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Volume:
54
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.54.006924
Date:
August, 2015
File:
PDF, 1.64 MB
english, 2015
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