Multi-oxide active layer deposition using Applied Materials...

Applied Physics A: Materials Science & Processing 2015 / 11 Vol. 121; Iss. 2

Multi-oxide active layer deposition using Applied Materials Pivot array coater for high-mobility metal oxide TFT

Park, Hyun Chan, Scheer, Evelyn, Witting, Karin, Hanika, Markus, Bender, Marcus, Hsu, Hao Chien, Yim, Dong Kil
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Volume:
121
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-015-9459-7
Date:
November, 2015
File:
PDF, 2.14 MB
english, 2015
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