Interlocking mechanism for the fabrication of closed...

Semiconductor Science and Technology 2005 / 05 Vol. 20; Iss. 5

Interlocking mechanism for the fabrication of closed single-walled semiconductor microtubes

Mendach, S, Kipp, T, Welsch, H, Heyn, Ch, Hansen, W
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Volume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/5/013
Date:
May, 2005
File:
PDF, 320 KB
english, 2005
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