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Low-cost optical instrumentation for thermal characterization of MEMS
Jorez, S, Laconte, J, Cornet, A, Raskin, J-PVolume:
16
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/16/9/016
Date:
September, 2005
File:
PDF, 1024 KB
english, 2005