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The nanogap Pirani—a pressure sensor with superior linearity in an atmospheric pressure range
Khosraviani, Kourosh, Leung, Albert MVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/4/045007
Date:
April, 2009
File:
PDF, 751 KB
english, 2009