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Plasma-assisted quartz-to-quartz direct bonding for the fabrication of a multilayered quartz template for nanoimprint lithography
Lee, Jihye, Ali, Altun, Kim, Ki-don, Kim, Jae-Hyun, Choi, Dae-guen, Choi, Jun-Hyuk, Jeong, Jun-hoVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/4/045005
Date:
April, 2010
File:
PDF, 776 KB
english, 2010