Plasma Deposition of Fluorinated Amorphous Carbon with CHF...

Plasma Deposition of Fluorinated Amorphous Carbon with CHF 3 and C 6 H 6 Mixture

Shan-hua, Cheng, Jian, Kang, Chao, Ye, Zhao-yuan, Ning
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Volume:
2
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/2/6/010
Date:
December, 2000
File:
PDF, 286 KB
english, 2000
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