Growth of 3C-SiC Films on On-axis 6H-SiC Substrates by...

Chinese Journal of Chemical Physics 2007 / 06 Vol. 20; Iss. 3

Growth of 3C-SiC Films on On-axis 6H-SiC Substrates by LPCVD

Zheng, Hai-wu, Fu, Zhu-xi, Lin, Bi-xia, Li, Xiao-guang
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Volume:
20
Language:
english
Journal:
Chinese Journal of Chemical Physics
DOI:
10.1088/1674-0068/20/03/305-307
Date:
June, 2007
File:
PDF, 758 KB
english, 2007
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