[IEEE 2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Erlagol, Russia (2015.6.29-2015.7.3)] 2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices - GaAs MBE on vicinal substrates Si (001): Impact of nucleation and growth conditions on crystallographic properties of the epitaxial layers

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