[IEEE 2014 International Semiconductor Conference (CAS) - Sinaia, Romania (2014.10.13-2014.10.15)] 2014 International Semiconductor Conference (CAS) - Power supply architecture for high temperature chuck systems
Teodorescu, Laurentiu, Gheorghe, Andrei-Sorin, Draghici, Florin, Brezeanu, Gheorghe, Rusu, IonYear:
2014
Language:
english
DOI:
10.1109/SMICND.2014.6966432
File:
PDF, 241 KB
english, 2014