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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Design, fabrication and characterization of piezoelectrically actuated gimbal-mounted 2D micromirrors
Gu-Stoppel, S., Quenzer, H. J., Benecke, W.Year:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7181057
File:
PDF, 1.98 MB
english, 2015