Selective Silicon Epitaxy Using Reduced Pressure Technique
Tanno, Kohetsu, Endo, Nobuhiro, Kitajima, Hiroshi, Kurogi, Yukinori, Tsuya, HidekiVolume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.L564
Date:
September, 1982
File:
PDF, 933 KB
1982