Preparation Capacity of Reactive Evaporation Method for Amorphous Silicon
Shindo, Masanori, Sato, Shigeru, Myokan, Isao, Mano, Shigeru, Shibata, TakujiVolume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.14
Date:
January, 1985
File:
PDF, 755 KB
1985