RF Plasma Production at Ultralow Pressures with Surface...

Japanese Journal of Applied Physics 1990 / 6 Vol. 29; Iss. Part 2, No

RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement

Shirakawa, Teruyuki, Toyoda, Hirotaka, Sugai, Hideo
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1015
Date:
June, 1990
File:
PDF, 585 KB
1990
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