Variable-Energy Positron Studies of Vacancy-Type Defects in...

Japanese Journal of Applied Physics 1990 / 8 Vol. 29; Iss. Part 2, No

Variable-Energy Positron Studies of Vacancy-Type Defects in TiN Films on Si

Wei, Long, Dosho, Chisei, Cho, Yang-koo, Tanigawa, Shoichiro, Hinode, Kenji
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1500
Date:
August, 1990
File:
PDF, 507 KB
1990
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