Effect of the Beam Shape in Pseudoline Electron Beam...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 2, No

Effect of the Beam Shape in Pseudoline Electron Beam Recrystallization

Ishiwara, Hiroshi, Fukao, Kazuichi
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1871
Date:
October, 1990
File:
PDF, 565 KB
1990
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