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Improvement of Bonded Silicon-on-Insulator using TCE-Grown Oxide as Buried SiO 2
Huang, Qing-An, Chen, Jun-Ning, Zhang, Hui-Zhen, Tong, Qin-YiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.2854
Date:
June, 1993
File:
PDF, 302 KB
1993