Preoxide-Controlled Oxidation for Very Thin Oxide Films

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 1, No

Preoxide-Controlled Oxidation for Very Thin Oxide Films

Makihara, Koji, Teramoto, Akinobu, Nakamura, Kou, Kwon, Myoung Youn, morita, mizuho, Ohmi, Tadahiro
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.294
Date:
January, 1993
File:
PDF, 569 KB
1993
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