Four Types and Origins of Transient Si Wafer Deformation...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Four Types and Origins of Transient Si Wafer Deformation with Furnace Insertion and Withdrawal

Itsumi, Manabu, Kai, Junko
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5468
Date:
December, 1993
File:
PDF, 714 KB
1993
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