Noncontact Characterization for Carrier Recombination...

Noncontact Characterization for Carrier Recombination Center Related to Si-SiO 2 Interface

Katayama, Ken-ichi, Shimura, Fumio
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L395
Date:
March, 1993
File:
PDF, 560 KB
1993
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