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Noncontact Characterization for Carrier Recombination Center Related to Si-SiO 2 Interface
Katayama, Ken-ichi, Shimura, FumioVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L395
Date:
March, 1993
File:
PDF, 560 KB
1993